The semiconductor industry in our country holds a global market share of 60% in production capacity. The manufacturing process relies heavily on large quantities of high-purity wet chemicals, with hydrofluoric acid being a crucial raw material. The estimated annual usage of hydrofluoric acid is around 60,000 tons. Currently, domestic waste management companies handle waste hydrofluoric acid (C-0202, approximately 70,000 tons) and calcium fluoride sludge (D-0902 and R-0910, approximately 130,000 tons) through declaration processes. These materials are downgraded or reused across different industries, reflecting a linear consumption model.
However, our country lacks fluoride resource purification technology. Therefore, implementing effective recycling, purification, and reuse techniques for waste hydrofluoric acid resources becomes crucial. This aligns with the eighth strategy of the 2050 net-zero transition - "Zero Waste Resource Circulation" - aiming to extend the lifespan of chemical usage. To address this, our team has analyzed the distribution of waste hydrofluoric acid resources within the semiconductor industry. We've integrated data from material source analyses and developed a pilot process for producing high-purity acid-grade calcium fluoride. This process facilitates the circular reuse of waste hydrofluoric acid resources while evaluating the carbon reduction benefits of the manufacturing process. This initiative lays the foundation for establishing a closed-loop pathway for domestic waste hydrofluoric acid.
The annual work plan for this year comprises four major components, spanning from February 22nd to November 30th. The work objectives were successfully met within the planned timeframe and aligned with audit point criteria. The end-of-year work progress report includes the following:
Completion of a survey of five secondary technology factories in our country, involving visits, assessments, and the collection and analysis of baseline information on the treatment methods and output of waste hydrofluoric acid, including material flow diagrams. This also includes the composition baseline analysis of 36 instances of waste hydrofluoric acid and 38 instances of calcium fluoride sludge, encompassing purity, impurity content, physical and chemical analyses, and material composition tables. This analysis serves as a feasibility assessment for purification technologies. Additionally, international semiconductor waste hydrofluoric acid resource utilization technologies were analyzed, providing strategic references for the development of our country's waste hydrofluoric acid resource recycling technology.
Completion of the energy setup of the pilot production line for acid-grade calcium fluoride, which includes reaction vessels, purification equipment, granulation equipment, and more. This setup is used for testing process parameters and specification verification, with 70% or more of 26 instances of calcium fluoride sludge transformed into 97% acid-grade calcium fluoride purification. The composition tables for input and product specifications were established.
In the carbon footprint assessment section, an analysis was conducted on the reuse of domestic waste hydrofluoric acid resources and the life cycle and carbon footprint hotspots of natural fluorite process. This serves as the foundation for carbon footprint evaluation of the acid-grade calcium fluoride production process. The analysis of process carbon emissions hotspots was completed, and optimized carbon footprint strategies were proposed.
Integration of work progress and promotion of results, including the submission and presentation of two seminar papers on calcium fluoride testing and analysis techniques and fluorine-containing wastewater treatment technologies. One expert advisory meeting for the "High-Value Recycling Technology for Chemical Resources" program and one information session on "Domestic Waste Hydrofluoric Acid Resource Flow Analysis and Purification Recycling Opportunities" were organized. Additionally, three discussions were held on "High-Value Utilization of Waste Hydrofluoric Acid Resources," which are part of the development of the direction for the reuse of waste hydrofluoric acid resources in our country and the promotion of a domestic fluorine resource waste recycling new industrial ecosystem, aiming to strengthen domestic key resource reuse and value-added processes while reducing the disposal of waste materials through downgrading or burial.
